

Improving Product Value With TSM R&D



This is a cleaning system developed to clean very thin substrates (such as UTG and others) ranging from 30um to 100um. It moves away from the traditional ultrasonic dipping method and uses a sheet-by-sheet cleaning process. The system can remove various floating or stubborn contaminants, and depending on the configuration of the cleaning zone, it can also remove organic contaminants. The input and output can be configured as an in-line logistics system.



Slit Coating / Inspection / LED UV
The system is configured to perform Vision Alignment, Slit Coating, and UV Curing sequentially in a single piece of equipment. Panels are supplied via an in-line logistics system by a robot, and the system also includes automatic coating thickness inspection.

Precise Micro Pump
To be able to develop a high-precision dispensing pump that can handle a wide range of viscosities, from low-viscosity materials like Photo Resist and BM (3.5 to 20 cps) to high-viscosity materials like OCR (15,000 to 20,000 cps).

Slit Coating Nozzle
Design and manufacture nozzles, which are crucial components for coating quality, to match the characteristics of the coating solution. This ensures coating uniformity and facilitates maintenance by incorporating a lip.

OUR MISSION
Perfect Repair Through Vision Inspection
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